Lab Equipment
Lab equipment housed in multiple sites on campus
- QNC building (main campus)
- RAC1 building (north campus) *scroll down
- RAC2 building (north campus) *scroll down
Click here for information on how to gain access.
Deposition
- ALD / PECVD Cluster Deposition System
- LPCVD Low Temperature Oxidation (LTO) Furnace
- LPCVD Poly SIlicon and Silicon Carbide Furnace
- LPCVD Silicon Nitride Furnace
- Rapid Thermal Processor #1 (RTP)
- Rapid Thermal Processor #2 (RTP)
- PVD E-Beam & Resistive Heating Thermal Evaporator
- PVD E-Beam Long Throw Evaporator
- PVD Nb Superconducting Films Sputter System
- PVD Twin Chamber Sputter System
- PVD Al Superconducting Films Evaporator System
- PVD Thermal Evaporator for P-Type Contacts
- Thermal Oxidation Furnace
Lithography
- E-Beam Lithography System (30kV)
- E-Beam Lithography System (100kV)
- Beamer/Tracer Software Suite
- Front/Back Mask Aligner
- Wafer Bonder
- UV Direct Write Lithography System
- Oven: Convection
- Oven: HMDS & Image Reversal
- Spin Coater: Dual General Purpose Hood
- Spin Coater: E-Beam Resists
- Spin Coater: UV Resists
Dry Etch
Wet Benches
Characterization
- Bruker Atomic Force Microscope
- Scanning Electron Microscope
- Manual Cleaving Tool
- 4-Point Probe
- Electrical Prober Station: Generous donation from EVERBEING Intl.
- Electrical Probe Station
- Ellipsometer
- Microscope #1
- Microscope #2
- Reflectometer: Thin Film Mapping
- Reflectometer: Thin Film Spot Measurement
- Surface Profiler #1
- Surface Profiler #2
- Wafer Stress Measurement
- SEM Sample Coater
Packaging Lab QNC 1706
Sample Prep Lab QNC 1508
- Contact Angle Goniometer
- Diamond Scriber
- Solvents Chemical Processing Hood
- Acids & Bases Chemical Processing Hood