Deposition Summary of available deposition equipment https://qnfcf.uwaterloo.ca/equipment/main-cleanroom/deposition-1 https://qnfcf.uwaterloo.ca/@@site-logo/logo.png Deposition Summary of available deposition equipment Title Type ALD/PECVD Cluster [OXFORD-cluster] Folder Evaporator: Al Superconducting films [PLASSYS-Ebeam] Folder Evaporator: E-beam [ANGSTROM-Ebeam] Folder Evaporator: E-beam & thermal [INTLVAC-Ebeam] Folder Evaporator: thermal [ANGSTROM-Thermal] Folder LPCVD LTO [TYSTAR4-LTO] Folder LPCVD Poly Si [TYSTAR3-PolySiC] Folder LPCVD Silicon Nitride [TYSTAR2-nitride] Folder Oxidation [TYSTAR1-atm] Folder Rapid Thermal Processor #1 [ALLWIN-RTP] Folder Rapid Thermal Processor #2 [ALLWIN-RTP2] Folder Sputter: Nb Superconducting Films [PLASSYS-sputter] Folder Sputter: Twin Chamber [AJA-sputter] Folder
