General Info

Summary of system capabilities

Vendor: Reynoldstech
Model: Custom
Purpose: Wet bulk silicon etch via solutions of KOH

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes
  4. Buddy System policy applies to this equipment.

 

The Reynoldstech bulk Si etch wetbench is dedicated to performing wet isotropic Si etching using KOH solutions. KOH solutions are capable of etching Si with a directional selectivity of over 80:1 (<100>/<111>).

This wetbench is equipped with a heated quartz tank with reflux collar and recirculation and mechanical agitation. Automated wafer rinsing is accomplished through a Cascade rinse tank. This bench is also equipped with a sink and an aspirator for cleanup.

Available Options

  • Foot-pedal actuated DI water gooseneck
  • DI water spray rinse basket
  • DI water and nitrogen spray guns
  • Temperature-controlled quartz KOH bath with adjustable mechanical agitation
  • Cascade-type DI water rinse tank