General Info

Vendor: AJA International Inc.
Model: ATC Orion Series
Purpose: PVD of thin films via sputter deposition

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Available Options

  • Separate chambers for metal and dielectric deposition
  • Loadlock for quick loading
  • Quartz lamp substrate heating up to 800 oC
  • DC and RF power supplies
  • Substrate biasing for pre-cleaning
  • Sample sizes up to 150mm

Film Types Permitted (conductors chamber)

  • Al, Al 1% Si
  • Au
  • Ag
  • Ti
  • Cr
  • Cu
  • Fe
  • Ni
  • Nb
  • W
  • Ta
  • V
  • Other materials available by request

Film Types Permitted (insulators chamber)

  • Al2O3
  • SiO2
  • MgO
  • TiO2
  • ZnO
  • ITO
  • AZO (2% Al)
  • Other materials available by request