Lithography Summary of available lithography equipment https://qnfcf.uwaterloo.ca/equipment/main-cleanroom/lithography https://qnfcf.uwaterloo.ca/@@site-logo/QNFCF.svg Lithography Summary of available lithography equipment Title Type Image Beamer/Tracer Software Package [BEAMER] Folder E-Beam Litho 30kV [RAITH-EBL] Folder E-Beam Litho 100kV [JEOL-EBL] Folder Mask/Bond Aligner: Front/Back Capable [SUSS-align] Folder Wafer Bonder [SUSS-bond] Folder Oven: Convection [FISHER-oven] Folder Oven: HMDS & Image Reversal [YES-HMDS] Folder Spin Coat: Dual general purpose [REYNOLDSTECH-twincoater] Folder Spin Coat: E-Beam Resist Station [BREWER-Ebeamspinbake] Folder Spin Coat: UV Resist Station [BREWER-UVspinbake] Folder UV Direct Write [HEIDELBERG-MLA] Folder
