Dry etch
Summary of available dry etch equipment
| Title | Type | Image | |
|---|---|---|---|
| Ion Mill [AJA-ionmill] | Folder | ||
| Photoresist Stripper [YES-ash] | Folder | ||
| RIE: Deep Si [OXFORD-SiRIE] | Folder | ||
| RIE: Metals & III-V [OXFORD-metalRIE] | Folder |
Summary of available dry etch equipment
| Title | Type | Image | |
|---|---|---|---|
| Ion Mill [AJA-ionmill] | Folder | ||
| Photoresist Stripper [YES-ash] | Folder | ||
| RIE: Deep Si [OXFORD-SiRIE] | Folder | ||
| RIE: Metals & III-V [OXFORD-metalRIE] | Folder |