General Info
Optical profiling system
Vendor: Bruker
Model: Contour Elite I 3D Optical Metrology system
Purpose: Optical (non-contact) 3D surface characterization of a wide range of substrates & devices
Important
- Material restrictions in effect: click here
- Training required prior to use: click here
- More info for lab members: Manuals and Processes
Tool Specifications
| Parameter | Specification |
|---|---|
| Maximum sample height | 100mm |
| Maximum sample footprint | 150mm x 150mm |
| Available interferometry methods | Vertical Scanning Interferometry (VSI) Phase Shift Interferometry (PSI) |
| VSI specifications | 10um step size with standard deviation on step average of less than 10nm Vertical scan speed of 73um/sec Vertical scan range of up to 10nm Able to measure surfaces with reflectivity as low as 0.05% |
| PSI specifications | Vertical resolution better than 0.01nm RMS repeatability of 0.01nm Step height accuracy of better than 0.75% (for step heights of 8um or greater) |
| Available lenses & objectives | FOV lens, 0.55X FOV lens, 2X 10X Interferometric Objective, 7.4mm Working Distance 50X Interferometric Objective, 3.4mm Working Distance |