General Info

Vendor: AJA International Inc.
Model: ATC Orion Series
Purpose: PVD of thin films via sputter and E-beam deposition

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Available Options

  • Separate chambers for sputter and electron beam deposition
  • Loadlock for quick loading
  • Quartz lamp substrate heating up to 800 oC
  • DC and RF power supplies
  • Sample sizes up to 76.2 mm / 3"

Film Types Permitted (sputter chamber)

  • Al
  • Al2O3
  • B
  • LiCoO2
  • Li3PO4
  • Cu
  • Gd
  • ITO
  • Cr
  • Fe
  • Co
  • Ni
  • Mn
  • In
  • Sn
  • LSMO
  • Mg
  • MgB2
  • MgO
  • Nb
  • Ta
  • W
  • Mo
  • Ti
  • Si
  • SiO2
  • Ru
  • YBCO
  • FeMn
  • CoFeB
  • CoFe
  • NiFe
  • Other materials available by request

Film Types Permitted (evaporation chamber)

  • Al
  • Al2O3
  • Mg
  • MgO
  • SiO
  • NaCl
  • LiF
  • Ru
  • Y
  • Cr
  • Fe
  • Co
  • Ni
  • NiFe
  • FeCo
  • Ti
  • Pt
  • Cu
  • Bi
  • Cd
  • Sb
  • Gd
  • EuS
  • Other materials available by request