General Info

Summary of system capabilities

Vendor: Reynoldstech
Model: Custom
Purpose: Development of E-Beam resists


  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes
The Reynoldstech E-beam development wetbench is dedicated to the development of E-beam sensitive resist films in standard developers (typically solvents). This bench is equipped with separate cupsinks for solvent and DI water disposal. This bench is also equipped to facilitate cold development of E-beam resists.