General Info
Summary of system capabilities
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General Info
Summary of system capabilities
Vendor: ReynoldstechModel: Custom
Purpose: Development of E-Beam resists
Important
- Material restrictions in effect: click here
- Training required prior to use: click here
- More info for lab members: Manuals and Processes
The Reynoldstech E-beam development wetbench is dedicated to the development of E-beam sensitive resist films in standard developers (typically solvents). This bench is equipped with separate cupsinks for solvent and DI water disposal. This bench is also equipped to facilitate cold development of E-beam resists.
