Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates

  • silicon
  • III-V semiconductor materials such as GaAs, InP, etc.
  • glass
  • quartz
  • fused silica

Authorized Thin Films

  • all types of electron-beam photoresists
  • silicon dioxide
  • silicon nitride
  • polysilicon/amorphous silicon
  • aluminum
  • titanium
  • gold
  • chrome

PROHIBITED Substrates & Films

  • ZnSe
  • Se