General Info

Summary of system capabilities
Vendor: Tousimis
Model: Autosamdri-815B, Series C
Purpose: Critical point drying of membranes and cantilevers after release


  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes
The critical point dryer dries membranes and cantilevers after HF release or KOH/TMAH release. Only IPA is permitted in this tool. Use of unauthorized chemicals on this bench will not be tolerated and will result in immediate suspension of access privileges.

Available Options

  • substrate holders for 5x10 mm square dies and 2", 3" and 4" wafers
  • 3 chamber inserts