General Info

Summary of system capabilities

Vendor:   Leica Microsytems
Model:     Leica EM ACE600
Purpose:  Versatile high vacuum film deposition instrument for FE-SEM applications


  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Film Types Available

The Leica ACE600 sputter coater is strictly dedicated to the deposition of thin films of Iridium prior to SEM sample imaging.

    Additional Information

    • This system is configured to handle samples mounted on aluminum SEM stubs or unmounted samples up to a maximum 4" diameter
    • Stage holder configured for 'pin-style' SEM stubs 
    • Optional use of quartz crystal thickness monitor or timed deposition