Authorized Materials

Summary of material constraints


Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Materials

  • Any dry, clean monocrystalline substrates (Si, SiC, Sapphire) with thicknesses less than 1mm are permitted


  • Check with staff before working with materials not listed above