General Info

Summary of system capabilities
Vendor:   Veeco Instruments Inc. (now supported by Bruker Inc.)
Model:     DiInnova 
Purpose:  Scanning probe microscopy of samples in inert atmosphere


  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Tool Specifications

  • Sample Size: 45 mm X 45 mm X 18 mm
  • Motorized Z travel : 18 mm, with pitch and tilt capability
  • Z noise floor : <50 pm RMS
  • Z linearizer noise : <200 pm RMS 
Parameter Large Area Scanner Small Area Scanner
 Scan Size 90 um X 90 um  5 um X 5 um
Z range 7.5 um 1.5 um
X-Y noise <1.2 nm RMS -
X-Y drift <3 nm/min  1 nm/min


Available AFM modes

Contact Mode, Tapping Mode, Scanning Tunneling Microscopy, Conductive AFM, Piezo Response, Force Modulation, Surface Potential, Magnetic Force Microscopy