General Info
Summary of system capabilities
Vendor: Zeiss
Model: AURIGA 40 SEM/FIB
Purpose: TEM sample preparation and precision micro-milling of various solid materials
Model: AURIGA 40 SEM/FIB
Purpose: TEM sample preparation and precision micro-milling of various solid materials
Important
- Material restrictions in effect: click here
- Training required prior to use: click here
- More info for lab members: Manuals and Processes
Specifications
SEM Imaging
Column |
Zeiss Gemini |
Emitter |
Schottky field emitter |
Resolution |
1.9 nm @ 1 kV |
|
1.0 nm @ 15 kV |
Magnification |
12 x -1000 kx. |
Acceleration voltage |
0.1 - 30 kV |
FIB
Column |
Orsay Physics Cobra |
Emitter |
Ga liquid metal ion source |
Resolution |
<2.5 nm at 30 kV |
Magnification |
300 x -500 kx. |
Acceleration voltage |
1 - 30 kV |
Detectors
InLens
SESI
ESB
NTS BSD
STEM
Stage
Stage |
EFjeld |
X: |
0 mm - 100 mm |
Y: |
0 mm - 100 mm |
Z: |
0 mm - 50 mm |
M: |
0 mm - 13 mm |
T: |
-4°- 70° |
R: |
-360° - 360° |
Gas Injection System
Five channel GIS |
Pt, C, F, H2O, SiO2 |
Charge Compensation
Flood gun
Micromanipulator
Kleindiek MM3A-EM