General Info

Summary of system capabilities

Vendor:   Zeiss
Model:     AURIGA 40 SEM/FIB
Purpose:  TEM sample preparation and precision micro-milling of various solid materials

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Specifications

SEM Imaging

Column 

Zeiss Gemini

Emitter  

Schottky field emitter 

Resolution 

1.9 nm @ 1 kV 

 

1.0 nm @ 15 kV 

Magnification  

12 x -1000 kx. 

Acceleration voltage  

0.1 - 30 kV 

 

FIB

Column 

Orsay Physics Cobra 

Emitter  

Ga liquid metal ion source 

Resolution 

<2.5 nm at 30 kV 

Magnification  

300 x -500 kx. 

Acceleration voltage 

1 - 30 kV 

 

Detectors 

InLens 
SESI 
ESB 
NTS BSD  
STEM 

 

Stage

Stage 

EFjeld 

X: 

 0 mm - 100 mm 

Y: 

 0 mm - 100 mm 

Z: 

 0 mm - 50 mm 

M:  

 0 mm - 13 mm 

T:  

     -4°- 70° 

R:  

-360° - 360° 

 

Gas Injection System 

Five channel GIS

Pt, C, F, H2O, SiO2 

 

Charge Compensation 

Flood gun 

 

Micromanipulator 

Kleindiek MM3A-EM