Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges


  1. Any sample that will outgas under vacuum (check with staff if uncertain). This includes but is not limited to samples containing elemental sulpher or phosphorus
  2. Samples containing any degree of moisture
  3. Geological samples
  4. Biological samples
  5. Samples containing dust or powders, including magnetic powders or nanoparticles.

Authorized Substrates & Thin Films

  • Polymer films: All photo/e-beam resists, conditional on them being fully baked/cured based on manufacturers instructions.CNTs, graphene
  • Silicon
  • III-V's
  • ZnSe
  • Ag
  • Al
  • Al2O3
  • Au
  • Bi2Te3
  • Cr
  • Cu
  • EuS
  • Ge
  • HfO2
  • ITO
  • Nb
  • Ni
  • Pd
  • Pt
  • SiNx
  • SiO2
  • Ti
  • TiO2
  • TiW
  • W


  1. Copper or Carbon tape should be used to adhere all samples loaded into the system. Silver-epoxy can be used if allowed to dry in air for 10 minutes prior to loading into the system
  2. If any other materials are present on your samples, CONTACT STAFF BEFORE PROCEEDING