Authorized Materials
Summary of material constraints
Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.
Non compliance will result in loss of member privileges
Authorized Materials
- Silicon chips
- III-V semiconductor chips such as GaAs, InP, etc.
- Glass
- Quartz
- Fused silica
- Diamond
- Metal films: Al, Au, Cr, Ti, Ni, Ge, Pt, Fe, Nb, NbN, NbTiN
- Dielectric films (Al2O3, SiN, SiO2, TiO2)
- Printed circuit boards
- Integrated circuit packages
PROHIBITED Materials
- None identified to date. Check with staff before working with materials not listed above