Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates & Thin Films

  • silicon, sapphire, glass substrates ONLY, which may be coated with:
    • all types of positive and negative optical and electron-beam photoresists (PMMA, ZEP, HSQ, Polystyrene)
    • alumina (Al2O3)
    • silicon nitride
    • silicon dioxide
    • amorphous silicon and polysilicon
    • thin films of: Ti, Al, Ni, Cr, Au, Pt, Ge
    • if any other materials are present on your samples, CONTACT STAFF BEFORE PROCEEDING

PROHIBITED Substrates & Films

The possibility of introducing the following films has been studied. Our research has concluded that the risk of water contamination resulting from cutting residues is too high. Thus, these materials are NOT ALLOWED in this system:
  • Any material that may cause long lasting harmful effects to aquatic life
  • Selenides: Se, ZnSe
  • Arsenides: GaAs, InGaAs, ...
  • Phosphides: InP, InGaP, GaP, ...
  • Tellurides: CdTe, Bi2Te3, BiSbTe, etc.