General Info

Summary of system capabilities

Vendor: Reynoldstech
Model: Custom
Purpose: Development of E-Beam resists

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

 

The Reynoldstech UV development wetbench is dedicated to the development of UV sensitive photoresist films in standard alkaline developers (typically mild bases). This bench is equipped with a cup sink for developer disposal and a sink for DI water rinsing.