Authorized Materials
Summary of material constraints
Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.
Non compliance will result in loss of member privileges
Authorized Substrates
- silicon
- III-V semiconductor materials such as GaAs, InP, etc.
- glass
- quartz
- fused silica
Authorized Thin Films
- all types of positive and negative optical and electron-beam photoresists
- silicon dioxide
- silicon nitride
- polysilicon/amorphous silicon
- aluminum
- titanium
- gold
- chrome
PROHIBITED Substrates & Films
- ZnSe
- Se
- Bi2Te3