Authorized Materials
Summary of material constraints
Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.
Non compliance will result in loss of member privileges
Authorized Substrates
- Silicon
Authorized Thin Films
- silicon dioxide
- silicon nitride
- polysilicon/amorphous silicon
- organic photoresists
PROHIBITED Substrates & Films
- ZnSe
- Se
- Bi2Te3