Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates

  • Silicon

Authorized Thin Films

  • silicon dioxide
  • silicon nitride
  • polysilicon/amorphous silicon
  • organic photoresists

PROHIBITED Substrates & Films

  • ZnSe
  • Se
  • Bi2Te3