Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates & Thin Films

  • ONLY prime quality, new, 100mm silicon wafers permitted
  • Prime wafers coated with the following films:
    • silicon nitride (deposited via LPCVD only)
    • silicon dioxide (thermally grown only)
    • amorphous silicon and polysilicon (deposited via LPCVD only)
    • if any other materials are present on your samples, CONTACT STAFF BEFORE PROCEEDING

PROHIBITED Substrates & Films

  • GaAs
  • InP
  • ZnSe
  • Se
  • Zn
  • In
  • Sb
  • Bi2Te3
  • ALL metal films
  • ALL photoresists
  • ALL plastics & tapes