Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates

  • silicon
  • III-V semiconductor materials such as GaAs, InP, etc.
  • Borofloat, MEMpax, Pyrex 7740 and similar specialty glasses
  • quartz and fused silica

Authorized Films

  • Pre-baked  or cured resists including photo and e-beam resists
  • all types of solid dielectric films such as silicon dioxide, silicon nitride, etc.
  • all types of solid conducting films such as indium, chrome, aluminum, gold, titanium, etc.

PROHIBITED materials

  • Soda lime