Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Substrate Dimensions

  • Substrate thickness less than 11 mm
  • Maximum substrate size 105 x 188 mm

Authorized Substrates

  • silicon
  • III-V semiconductor materials such as GaAs, InP, etc.
  • glass
  • quartz
  • fused silica
  • ZnSe
  • PET, PC, PVC

Authorized Films

  • Stensborg UV curable resins: DM57, X29, X30-L
  • all types of positive and negative photoresists
  • all types of solid dielectric films such as silicon dioxide, silicon nitride, etc.
  • all types of solid conducting films such as chrome, aluminum, gold, titanium, etc.

PROHIBITED Films

  • Any film not specifically authorized above is NOT PERMITTED