Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates

  • silicon
  • III-V semiconductor materials such as GaAs, InP, etc.
  • glass
  • quartz
  • fused silica

Authorized Films

  • all types of positive and negative photoresists that have a baking temperature between 100°C and 120°C


  • Any substrate or film not specifically mentioned above is PROHIBITED
  • Halogenated solvents