General Info

Summary of system capabilities

Vendor:   Thermo Fisher Scientific
Model:     3490M Class 100 Cleanroom Convection Oven
Purpose:  Baking of various photoresist films


  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Temperature Control Precision

  • @ 100oC:  +/- 0.1oC
  • @ 200oC:  +/- 0.2oC