Authorized Materials

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates

• silicon
• III-V semiconductor materials such as GaAs, InP, etc.
• glass
• quartz
• fused silica

Authorized Films

• all types of positive and negative optical and electron-beam photoresists