Authorized Materials
Summary of material constraints
Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.
Non compliance will result in loss of member privileges
Authorized Substrates
- silicon
- III-V semiconductor materials such as GaAs, InP, etc.
- glass
- quartz
- fused silica
- ZnSe
Authorized Films
- all types of positive and negative photoresists
- all types of solid dielectric films such as silicon dioxide, silicon nitride, etc.
- all types of solid conducting films such as chrome, aluminum, gold, titanium, etc.