General Info

Software for e-beam lithography

Vendor:   GenISys Gmbh
Purpose:  BEAMER is a comprehensive software platform for preparing data for exposure on the JEOL JBX-6300FS. TRACER is a Monte-Carlo simulator that allows to compute the electron-solid interaction part of the exposure and to generate a Point Spread Function (PSF) for proximity effect corrections (PEC).

Additional Information

More info for lab members: Manuals and Processes