Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates & Thin Films

  • Silicon
  • III-V semiconductor materials such as GaAs, InP, etc.
  • ZnSe
  • Glass
  • Quartz
  • Fused silica
  • Diamond
  • Films of positive and negative optical and electron-beam photoresists
  • Metal films: Al, Au, Ag, Cr, Ti, Ni, Ge, Pt, Fe, Nb, NbN, NbTiN, TiW, V, NiCr, In
  • Dielectric films: Al2O3, SiN, SiO2, TiO2, SnO2
  • VO2
  • Bi2Te3, MgB2, EuS