AJA Target Change Schedule
Each chamber may only accommodate 4 deposition materials at once.
A target change schedule is in place to address the diverse deposition needs of lab members in an equitable and transparent manner.
NOTES:
- Target positions P1 & P2 in each chamber will generally remain fixed.
- Target positions P3 and/or P4 in each chamber will be changed out on a week-by-week basis as a function of target change requests received in any given week.
- Equipment users authorized to independently operate the AJA-sputter system may submit a target change request via the TARGET CHANGE REQUEST FORM (login required).
- Target change requests for any given week must be received no later than 12-noon on the preceding Thursday.
- Requests will be processed on a first-come first-served basis.
- Requested targets will be installed by 4PM on the Friday after the Thursday 12-noon request deadline.
- Target materials available:
- Chamber 1 (conductors): Al, Al 1%Si, Cr, Fe, ITO, Nb, Ni, Ti, W, Au, Xuser
- Chamber 2 (insulators): Al2O3, MgO, SiO2, TiO2, AZO (2% Al), ITO, Xuser
- Requested targets will remain in place:
- for 1 week, until 12-noon of the following Friday after the target's initial installation.
- The target(s) may be permitted to remain in place for longer if no new requests are received in subsequent week.s
- User-owned targets are identified as "Xuser" in the table.
Chamber 1 - conductors |
Chamber 2 - insulators |
|||||||
---|---|---|---|---|---|---|---|---|
PERIOD |
P1 | P2 | P3 | P4 |
P1 |
P2 |
P3 |
P4 |
Install June 16 | Al | Ti | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install June 23 | Al | Cu | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install June 30 | Al | Ti | Ag | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install July 7 | Al | Ti | Ag | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install July 14 | Al | Ti | Ag | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install July 21 | Al | Ti | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install July 28 | Al | Cu | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install Aug 4 | Al | Ti | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install Aug 11 | Al | Ti | Au | W | ITO | SiO2 | TiO2 | Al2O3 |
Install Aug 18 | Al | Ti | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install Aug 25 | Al | Ti | Au | Nb | ITO | SiO2 | TiO2 | Al2O3 |
Install Sept 1 | Al | Ti | Au | Cr | ITO | SiO2 | TiO2 | Si |
Install Sept 8 | Al | Ti | Au | Cr | ITO | SiO2 | TiO2 | Si |
Install Sept 15 | Al | Ti | Au | Cr | ITO | SiO2 | TiO2 | Al2O3 |
Install Sept 22 | Al | Ti | Au | Cr | TiSi2 | SiO2 | SiNi | Si |
Install Sept 29 | Al | Ti | Au | Fe | TiSi2 | SiO2 | TiO2 | Si |
Install Oct 6 | Al | Ti | Au | Fe | TiSi2 | SiO2 | TiO2 | Al2O3 |
Install Oct 13 | Al | Ti | Au | Fe | TiSi2 | SiO2 | TiO2 | Al2O3 |
Install Oct 20 | Al | Ti | Au | Fe | TiSi2 | SiO2 | TiO2 | Al2O3 |
Install Oct 26 | Al | Ti | Au | Fe | TiSi2 | SiO2 | TiO2 | Al2O3 |
Install Nov 3 | Al | Ti | Au | Fe | TiSi2 | ITO | TiO2 | Al2O3 |
Install Nov 10 | Al | Ti | Au | Cr | TiSi2 | ITO | TiO2 | Si |
install Nov 17 | Al | Ti | Au | Cr | TiSi2 | ITO | Si | Al2O3 |
Install Nov 24 | Al | Ti | Ag | Cr | TiO2 | ITO | Si | Al2O3 |
Install Dec 1 | Al | Ag | Au | Cr | TiO2 | SiO2 | Si | Al2O3 |
Install Dec 8 | Al | Ag | Au | Cr | TiO2 | SiO2 | Si | Al2O3 |
Install Dec 15 | Al | Ag | Au | Fe | TiO2 | SiO2 | NiSi | Al2O3 |
Install Dec 22 | Al | Ag | Au | Fe | TiO2 | SiO2 | NiSi | Al2O3 |
Install Jan 5 | Al | Ag | Au | Fe | TiO2 | SiO2 | NiSi | Al2O3 |
Install Jan 12 | Al | Ag | Au | Fe | TiO2 | SiO2 | Si | Al2O3 |
Install Jan 19 | Al | Ag | Au | Cr | TIO2 | SiO2 | SI | ITO |
Install Jan 26 | Al | Ag | Au | Cr | TiO2 | SiO2 | Si | ITO |
Install Feb 2 | Al | Ti | Au | Cr | TiO2 | SiO2 | Si | ITO |
Install Feb 9 | Al | Ti | Au | Cr | TiO2 | SiO2 | Al2O3 | ITO |
Install Feb 16 | Al | Ti | Au | Cr | TiO2 | SiO2 | Al2O3 | ITO |
Install Feb 23 | Al | Nb | Au | Cr | TiO2 | SiO2 | Si | NiSi |
Install Mar 1 | Al | Ag | Au | Cr | TiO2 | SiO2 | Si | NiSi |
Install Mar 8 | Al | Nb | Au | Fe | TiO2 | SiO2 | Al2O3 | ITO |
Install Mar 15 | Al | Nb | Au | Cr | Al2O3 | SiO2 | Si | NiSi |
Install Mar 22 | Ag | Nb | Au | Cr | ITO | SiO2 | Si | NiSi |
Install Mar 28 | Al | Ti | Au | Ag | ITO | SiO2 | Si | Al2O3 |
Install Apr 5 | Al | Ti | Ag | Cr | ITO | SiO2 | NiSi | Al2O3 |
Install Apr 12 | Al | Nb | Ag | Cr | ITO | SiO2 | NiSi | Al2O3 |
Install Apr 19 | Al | Nb | Au | Cr | ITO | SiO2 | NiSi | Al2O3 |
Install Apr 26 | Ta | Ti | Au | Pt | ITO | Al2O3 | ||