AJA Target Change Schedule

Each chamber may only accommodate 4 deposition materials at once.

A target change schedule is in place to address the diverse deposition needs of lab members in an equitable and transparent manner.

NOTES:

  1. Target positions P1 & P2 in each chamber will generally remain fixed.
  2. Target positions P3 and/or P4 in each chamber will be changed out on a week-by-week basis as a function of target change requests received in any given week.
  3. Equipment users authorized to independently operate the AJA-sputter system may submit a target change request via the TARGET CHANGE REQUEST FORM (login required).
  4. Target change requests for any given week must be received no later than 12-noon on the preceding Thursday.
  5. Requests will be processed on a first-come first-served basis.
  6. Requested targets will be installed by 4PM on the Friday after the Thursday 12-noon request deadline.
  7. Target materials available:
    • Chamber 1 (conductors): Al, Al 1%Si, Cr, Fe, ITO, Nb, Ni, Ti, W, Au,  Xuser
    • Chamber 2 (insulators): Al2O3, MgO, SiO2, TiO2, AZO (2% Al), ITO, Xuser
  8. Requested targets will remain in place:
    • for 1 week, until 12-noon of the following Friday after the target's initial installation.
    • The target(s) may be permitted to remain in place for longer if no new requests are received in subsequent week.s
    • User-owned targets are identified as "Xuser" in the table.

Chamber 1 - conductors
 Chamber 2 - insulators
PERIOD
 P1 P2 P3 P4
 P1
 P2
 P3
 P4
Install Mar 15 Al Nb Au Cr Al2O3 SiO2 Si NiSi
Install Mar 22 Ag Nb Au Cr ITO SiO2 Si NiSi
Install Mar 28 Al Ti Au Ag ITO SiO2 Si Al2O3
Install Apr 5 Al Ti Ag Cr ITO SiO2 NiSi Al2O3
Install Apr 12 Al Nb Ag Cr ITO SiO2 NiSi Al2O3
Install Apr 19 Al Nb Au Cr ITO SiO2 NiSi Al2O3
Install Apr 26 Ta Ti Au Pt ITO SiO2 NiSi Al2O3
Install May 3 Al Ti Au Pt ITO SiO2 NiSi Al2O3
Install May 10 Al Ti Au Nb ITO SiO2 TiO2 Al2O3
Install May 17 Al Ti Au Nb ITO SiO2 TiO2 Si
Install May 23 Al Ti Ag Nb ITO SiO2 Al2O3 Si
Install May 31 Al Ta Ag Pt ITO SiO2 Al2O3 Si
Install June 7 Al Ta Au Nb TiO2 SiO2 Al2O3 NiSi
Install June 14 Al Ta Au Nb TiO2 SiO2 Al2O3 NiSi
Install June 21 Al Ti Au Nb TiO2 SiO2 Al2O3 ITO
Install June 28 Al Ti Au Nb TiO2 SiO2 Si ITO
Install July 5 Al Ti Au Nb TiO2 SiO2 Si Al2O3
Install July 12 Al Ti Au Nb TiO2 SiO2 Si ITO
Install July 19 Al Ti Au Nb TiO2 SiO2 Si ITO
Install July 26 Al Ta Ag Nb TiO2 SiO2 Si ITO
Install Aug 2 Al Ta Ag Au TiO2 SiO2 Si ITO
Install Aug 9 Al Ta Ag Au TiO2 SiO2 Si ITO
Install Aug 16 Al Ta Ag Nb ITO SiO2 MgO Al2O3
Install Aug 23 Ti Ta Au Nb STO SiO2 Si Al2O3
Install Aug 30 Ti Ta Au Nb STO SiO2 Si Al2O3
Install Sept 6 Al Ti Au Nb ITO SiO2 MgO STO
Install Sept 13 Al Ta Ag Nb ITO SiO2 MgO Al2O3
Install Sept 20 Al Ta Ag Nb ITO SiO2 Si Al2O3
Install Sept 27 Al Ti Ag Nb ITO SiO2 STO Al2O3
Install Oct 4 Al Ti Ta Nb ITO SiO2 Si Al2O3
Install Oct 11 Au Ti Ta Cr ITO SiO2 STO MgO
Install Oct 18 Al Ag Au Cr ITO SiO2 Si MgO
Install Oct 25 Al Ag Au Cr ITO SiO2 Si MgO
Install Nov 1 Ta Ti Au Cr TiO2 SiO2 STO Al2O3
Install Nov 8 Al Ti Cu Cr ITO SiO2 STO Si
Install Nov 15 Al Ti Au Cr TiO2 SiO2 STO Si
Install Nov 22 Al Ti Au Cu ITO SiO2 STO Si
Install Nov 29 Al Ta Pt Cu ITO SiO2 NiSi Al2O3
Install Dec 6 Al Ti Au Cu ITO SiO2 NiSi STO
Install Dec 13 Al Ti Au W ITO SiO2 NiSi STO
Install Jan 10 Al Ti Au W ITO SiO2 NiSi Si
Install Jan 17 ITO SiO2 Si
Install Jan 24 ITO