AJA Target Change Schedule

A target change schedule is in place to address the diverse deposition needs of lab members in an equitable and transparent manner.

NOTES:

Target positions P1 & P2 in each chamber will generally remain fixed.
Target positions P3 and/or P4 in each chamber will be changed out on a week-by-week basis as a function of target change requests received in any given week.
Equipment users authorized to independently operate the AJA-sputter system may submit a target change request via the TARGET CHANGE REQUEST FORM (login required).
Target change requests for any given week must be received no later than 12-noon on the preceding Thursday.
Requests will be processed on a first-come first-served basis.
Requested targets will be installed by 4PM on the Friday after the Thursday 12-noon request deadline.
Target materials available:
- Chamber 1 (conductors): Al, Al 1%Si, Cr, Fe, ITO, Nb, Ni, Ti, W, Au, Xuser
- Chamber 2 (insulators): Al2O3, MgO, SiO2, TiO2, AZO (2% Al), ITO, Xuser
Requested targets will remain in place:
- for 1 week, until 12-noon of the following Friday after the target's initial installation.
- The target(s) may be permitted to remain in place for longer if no new requests are received in subsequent week.s
- User-owned targets are identified as "Xuser" in the table.