Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrate Materials

  • Silicon
  • Silicon Dioxide
  • Alumina
  • Sapphire
  • Fused Silica

Authorized Films for room temp depositions only

  • Standard Photo/E-beam resists
  • Aluminum
  • Titanium
  • Gold


    The possibility of introducing substrates coated with the following films has been studied. Our research has confirmed that the chamber contamination risk is too high. Therefore, these materials are NOT ALLOWED in this system:
    • In
    • Sb
    • Zn
    • Se