Authorized Materials

Summary of material constraints

Lab members wishing to introduce new materials into this system must first obtain authorization from staff. New material requests must be initiated by submitting a Process Review Request form.

Non compliance will result in loss of member privileges

Authorized Substrates & Thin Films

  • Silicon wafers (prime, new, virgin of acceptable origin)
  • SOI wafers (prime, new, virgin of acceptable origin)
  • SiO2 thin film (with known & proven clean history)

PROHIBITED Substrates & Films

  • ANY pre-processed substrate
  • ZnSe
  • Se
  • Kapton tape
  • Cool grease
  • Wax
  • Bi2Te3
  • ALL photoresists
  • ALL metal films

Important Note on Cleanliness

  • Pre-processed wafers must NOT be introduced into this furnace tube. Please submit an online Process Review Request with details of your process constraints and questions.
  • Wafers should NOT be handled outside the cleanroom prior to processing. Please bring your wafers to the cleanroom in their original, sealed factory packaging.

Additional Information

This system is configured to handle 4" diameter wafers with typical thickness of 550um (approx).