General Info
Summary of system capabilities
Purpose: Semiconductor wafer inspection
Important
- Material restrictions in effect: click here
- Training required prior to use: click here
- More info for lab members: Manuals and Processes
Tool Features
This lamp feature a yellow filter which blocks wavelengths shorter than 500 nm and produces three strong mercury lines at 543, 574 and 576 nm. The high contrast light is produced for fine surface particle detection. Particles down to 10 microns are routinely visible with this lamp.