General Info

Summary of system capabilities

Vendor: Filmetrics
Model: F40
Purpose: Tool for measuring thickness of patterned or unpatterned transparent thin films

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

System features

  • Wavelength range from 400 nm to 850 nm
  • Objective of 4x, 10x and 40x with spot sizes of 62.5 µm, 25 µm and 6.25 µm respectively (250 µm aperture)
  • Thickness range from 20 nm to 20 µm (stack and objective dependent)
  • Maximum substrate size: 100 mm wafer