General Info

Summary of system capabilities

Vendor: Filmetrics
Model: F50-UV
Purpose: Tool for mapping transparent thin film thickness

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Tool Features

  • Mapping available for 2" to 8" diameter round wafers.
  • Wavelength range from 200 nm to 1100 nm
  • Thickness range from 5 nm to 40 µm (film stack dependent)
  • Spot size of 1.5 mm