General Info

Summary of system capabilities
Vendor: Creative Design Engineering Inc.
Model: ResMap 178 4-point probe
Purpose: Tool for measuring resistivity of metals and doped semiconductors

Important

  1. Material restrictions in effect: click here
  2. Training required prior to use: click here
  3. More info for lab members: Manuals and Processes

Tool Features

  • Mapping available for 2" to 8" diameter round wafers.
  • Resistance measurement range: 2 mOhm/sq to 5 MOhm/sq
  • Wafer handling:  Manual load
  • Typical measurement time:  1 second per site
  • Measurement range:  2 mOhm/sq to 5 MOhm/sq
  • Repeatability (1 sigma):  <0.02 %
  • Accuracy:  <0.05 % (using NIST traceable ResCal standards)
  • Minimum edge exclusion:  1.5mm
  • Data:  May be plotted in ResMap tool or exported to Excel or other analysis programs.