






R&D Systems
R&D Systems
R&D Systems
FirstNano® manufactures configurable CVD systems for advanced research & development. Our equipment is used in universities and laboratories worldwide.
FirstNano® manufactures configurable CVD systems for advanced research & development. Our equipment is used in universities and laboratories worldwide.
FirstNano® manufactures configurable CVD systems for advanced research & development. Our equipment is used in universities and laboratories worldwide.

EasyTube® 6000 Series
EasyTube® 6000 Series
EasyTube® 6000 Series
CMOS | PV | MEMS | NEMS
CMOS | PV | MEMS | NEMS
CMOS | PV | MEMS | NEMS
The EasyTube® 6000 series multi-tube horizontal furnace systems are automatically controlled research units for batch processing of up to 100 wafers per run per tube, with up to four separately configured process tubes.
The EasyTube® 6000 series multi-tube horizontal furnace systems are automatically controlled research units for batch processing of up to 100 wafers per run per tube, with up to four separately configured process tubes.
The EasyTube® 6000 series multi-tube horizontal furnace systems are automatically controlled research units for batch processing of up to 100 wafers per run per tube, with up to four separately configured process tubes.
MULTI-TUBE HORIZONTAL FURNACE SYSTEMS
MULTI-TUBE HORIZONTAL FURNACE SYSTEMS
MULTI-TUBE HORIZONTAL FURNACE SYSTEMS




Processes
Processes
Processes
EasyTube® CVD systems can be configured for a wide range of substrate sizes and process requirements.
EasyTube® CVD systems can be configured for a wide range of substrate sizes and process requirements.
EasyTube® CVD systems can be configured for a wide range of substrate sizes and process requirements.
powered by:
powered by:
powered by:


Installed on all our systems
Easy to read Graphical User Interface
Includes:
Installed on all our systems
Easy to read Graphical User Interface
Includes:
Installed on all our systems
Easy to read Graphical User Interface
Includes:
Process control software
Recipe editing software
Log reader software
Configuration editing software
Process control software
Recipe editing software
Log reader software
Configuration editing software
Process control software
Recipe editing software
Log reader software
Configuration editing software







Collaboration Services
Collaboration Services
Collaboration Services
CVD Equipment Corporation offers collaboration services for your research grants, funding proposals, or startup funding. We provide industry resources with the aim to support commercialization and job creation. Contact us for a letter of collaboration.
CVD Equipment Corporation offers collaboration services for your research grants, funding proposals, or startup funding. We provide industry resources with the aim to support commercialization and job creation. Contact us for a letter of collaboration.
CVD Equipment Corporation offers collaboration services for your research grants, funding proposals, or startup funding. We provide industry resources with the aim to support commercialization and job creation. Contact us for a letter of collaboration.











FirstNano® EasyTube® systems are being used in breakthrough research and are featured in many academic publications.
FirstNano® EasyTube® systems are being used in breakthrough research and are featured in many academic publications.
FirstNano® EasyTube® systems are being used in breakthrough research and are featured in many academic publications.
Academic Publications Featuring FirstNano®
Academic Publications Featuring FirstNano®
Academic Publications Featuring FirstNano®
Do you need to take your research to the next level?
Our high-performance FirstNano® R&D chemical vapor deposition systems and process solutions are used to develop materials and coatings for innovative research worldwide.
What Researchers are Saying About Our Systems
"The purchase of the EasyTube® 3000 will enlarge the spectrum of our research with the growth of heterostructured nanowires, their doping, and with the possibility to extend the growth to a wide variety of other materials thanks to the liquid precursor kits. Our projects cover fundamental aspects (growth, carrier transport …) as well as potential applications (Nanoelectronics, Solar Energy, Nanophotonics, MEMS, and Sensors)."
- Pascal Gentile , Laboratory of Physics of Materials and MicrostructuresI built two CVD systems when setting up my lab. They were basically clones of a system I had used previously, so the design was already in my mind and mostly down on paper. However, I severely underestimated the time involved in selecting all the proper pieces and parts. By the time things finally came together and the first system came on-line, I found myself wishing I had simply purchased complete solutions from a company that had already invested the time to engineer a reliable system. As a new faculty member, funds are a limited resource, but time is even more so. Quickly getting the ball rolling on research is worth more than what one might save with a home-built approach.
- Erik Einarsson, Ph.D, Assistant Professor"I am glad to share with you the good news that ever since the very first batch of samples we continued to produce long and uniform silicon nanowires. Suffice to say that members of our research group are all impressed with the turn-key reliability as well as extensive safety features of this LPCVD system which greatly satisfy the needs of our fundamental research program in nanomaterials. We also appreciate the custom system design effort to cater to our needs from your expert team and your ability to deliver and install in a timely manner."
- Jie Xiang, Assistant Professor of Electrical and Computer Engineering"The FN/CVD Application & Research Lab provides our company with one-stop CNT process capabilities and technical staff support that we simply cannot get anywhere else and that help us accelerate the commercialization of our proprietary thin film technologies"
- Vincent Stenger, Ph.D, Principal Research Engineer"The researchers at the University of Cincinnati partnered with FirstNano®, a division of CVD Equipment Corp. of Ronkonkoma, N.Y., to use their laboratory and a specialized furnace called EasyTube® 3000. With this equipment, the research team succeeded to produce 18 millimeter long CNT array which is considered the longest aligned CNTs reported ever."
- Dr. Vesselin Shanov, Associate Professor of Chemical and Materials Engineering"It has been a pleasurable interaction with the FirstNano® process and development team. Collectively, collaborations between the Cornell Nanoscale Facility and FirstNano® have yielded single wall carbon nanotube growth from lithographically defined catalyst pads on full four inch wafers. Incorporating wafer scale nanoscale fabrication processes with predefined carbon based systems represents a major step forward in creating complex carbon based nanostructures. This enhanced functionality raises intriguing possibilities in modern scientific research of widely disparate endeavors."
- B. Rob Ilic, Ph.D, Research Associate | User Program Manager"The purchase of the EasyTube® 3000 will enlarge the spectrum of our research with the growth of heterostructured nanowires, their doping, and with the possibility to extend the growth to a wide variety of other materials thanks to the liquid precursor kits. Our projects cover fundamental aspects (growth, carrier transport …) as well as potential applications (Nanoelectronics, Solar Energy, Nanophotonics, MEMS, and Sensors)."
- Pascal Gentile , Laboratory of Physics of Materials and MicrostructuresI built two CVD systems when setting up my lab. They were basically clones of a system I had used previously, so the design was already in my mind and mostly down on paper. However, I severely underestimated the time involved in selecting all the proper pieces and parts. By the time things finally came together and the first system came on-line, I found myself wishing I had simply purchased complete solutions from a company that had already invested the time to engineer a reliable system. As a new faculty member, funds are a limited resource, but time is even more so. Quickly getting the ball rolling on research is worth more than what one might save with a home-built approach.
- Erik Einarsson, Ph.D, Assistant Professor